High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Published 2014 View Full Article

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Title
High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 556, Issue -, Pages 361-368
Publisher
Elsevier BV
Online
2014-02-02
DOI
10.1016/j.tsf.2014.01.059

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