Growth characteristics and electrical properties of Ta2O5 grown by thermal and O3-based atomic layer deposition on TiN substrates for metal–insulator–metal capacitor applications

Title
Growth characteristics and electrical properties of Ta2O5 grown by thermal and O3-based atomic layer deposition on TiN substrates for metal–insulator–metal capacitor applications
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 542, Issue -, Pages 71-75
Publisher
Elsevier BV
Online
2013-07-05
DOI
10.1016/j.tsf.2013.06.050

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