Aluminum-doped zinc oxide film with gradient property deposited at oblique angle

Published 2013 View Full Article

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Title
Aluminum-doped zinc oxide film with gradient property deposited at oblique angle
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 545, Issue -, Pages 205-209
Publisher
Elsevier BV
Online
2013-08-11
DOI
10.1016/j.tsf.2013.08.003

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