Effects of solid phase crystallization by rapid thermal annealing on the optical constants of sputtered amorphous silicon films

Published 2013 View Full Article

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Title
Effects of solid phase crystallization by rapid thermal annealing on the optical constants of sputtered amorphous silicon films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 545, Issue -, Pages 480-484
Publisher
Elsevier BV
Online
2013-08-24
DOI
10.1016/j.tsf.2013.08.070

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