SiNx thickness dependent morphology and mechanical properties of CrAlN/SiNx nanomultilayers

Title
SiNx thickness dependent morphology and mechanical properties of CrAlN/SiNx nanomultilayers
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 534, Issue -, Pages 367-372
Publisher
Elsevier BV
Online
2013-02-26
DOI
10.1016/j.tsf.2013.02.049

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