Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration

Title
Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 532, Issue -, Pages 98-105
Publisher
Elsevier BV
Online
2012-12-09
DOI
10.1016/j.tsf.2012.11.101

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