Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering

Title
Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 547, Issue -, Pages 52-56
Publisher
Elsevier BV
Online
2013-05-17
DOI
10.1016/j.tsf.2013.05.011

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