Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc

Published 2013 View Full Article

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Title
Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 537, Issue -, Pages 108-112
Publisher
Elsevier BV
Online
2013-04-24
DOI
10.1016/j.tsf.2013.04.029

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