Preparation and characterization of ultra-thin amphiphobic coatings on silicon wafers

Title
Preparation and characterization of ultra-thin amphiphobic coatings on silicon wafers
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 537, Issue -, Pages 202-207
Publisher
Elsevier BV
Online
2013-04-24
DOI
10.1016/j.tsf.2013.04.027

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