Failure mechanism of copper through-silicon vias under biased thermal stress

Title
Failure mechanism of copper through-silicon vias under biased thermal stress
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 546, Issue -, Pages 14-17
Publisher
Elsevier BV
Online
2013-05-19
DOI
10.1016/j.tsf.2013.05.039

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