Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants

Published 2013 View Full Article

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Title
Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 531, Issue -, Pages 243-250
Publisher
Elsevier BV
Online
2013-02-01
DOI
10.1016/j.tsf.2013.01.091

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