Low refractive index SiOF thin films prepared by reactive magnetron sputtering

Published 2013 View Full Article

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Title
Low refractive index SiOF thin films prepared by reactive magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 542, Issue -, Pages 332-337
Publisher
Elsevier BV
Online
2013-07-12
DOI
10.1016/j.tsf.2013.07.009

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