Site-controlled fabrication of dimension-tunable Si nanowire arrays on patterned (001)Si substrates

Published 2011 View Full Article

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Title
Site-controlled fabrication of dimension-tunable Si nanowire arrays on patterned (001)Si substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 8, Pages 3309-3313
Publisher
Elsevier BV
Online
2011-11-10
DOI
10.1016/j.tsf.2011.10.172

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