Electrical and physical characteristics for crystalline atomic layer deposited beryllium oxide thin film on Si and GaAs substrates

Published 2011 View Full Article

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Title
Electrical and physical characteristics for crystalline atomic layer deposited beryllium oxide thin film on Si and GaAs substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 7, Pages 3091-3095
Publisher
Elsevier BV
Online
2011-12-07
DOI
10.1016/j.tsf.2011.11.053

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