High performance self-aligned top-gate ZnO thin film transistors using sputtered Al2O3 gate dielectric

Published 2012 View Full Article

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Title
High performance self-aligned top-gate ZnO thin film transistors using sputtered Al2O3 gate dielectric
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 21, Pages 6681-6683
Publisher
Elsevier BV
Online
2012-06-29
DOI
10.1016/j.tsf.2012.06.066

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