Spectroscopic ellipsometry analysis of TiO2 films deposited by plasma enhanced chemical vapor deposition in oxygen/titanium tetraisopropoxide plasma

Published 2012 View Full Article

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Title
Spectroscopic ellipsometry analysis of TiO2 films deposited by plasma enhanced chemical vapor deposition in oxygen/titanium tetraisopropoxide plasma
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 522, Issue -, Pages 366-371
Publisher
Elsevier BV
Online
2012-07-26
DOI
10.1016/j.tsf.2012.07.091

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