Crack-free yttria stabilized zirconia thin films by aerosol assisted chemical vapor deposition: Influence of water and carrier gas

Published 2012 View Full Article

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Title
Crack-free yttria stabilized zirconia thin films by aerosol assisted chemical vapor deposition: Influence of water and carrier gas
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 522, Issue -, Pages 58-65
Publisher
Elsevier BV
Online
2012-09-25
DOI
10.1016/j.tsf.2012.09.042

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