Combined TiN- and TaN temperature compensated thin film resistors

Title
Combined TiN- and TaN temperature compensated thin film resistors
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 6, Pages 2162-2165
Publisher
Elsevier BV
Online
2011-09-30
DOI
10.1016/j.tsf.2011.09.050

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