Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

Published 2011 View Full Article

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Title
Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 7, Pages 2689-2694
Publisher
Elsevier BV
Online
2011-11-24
DOI
10.1016/j.tsf.2011.11.040

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