4.4 Article

Solution processed Al doped ZnO film fabrication through electrohydrodynamic atomization

Journal

THIN SOLID FILMS
Volume 520, Issue 20, Pages 6398-6403

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2012.06.050

Keywords

Thin films; ZnO:Al; Opto-electronics; Window layers; Electrohydrodynamic atomization

Funding

  1. Ministry of Knowledge Economy, Korea
  2. cooperative RD Program [B551179-08-03-00]
  3. Korea Research Council Industrial Science and Technology, Republic of Korea

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In this study, highly transparent, 250 nm thick films of Aluminum doped Zinc-oxide (ZnO:Al) are achieved on glass substrates at ambient conditions through a solution processing technique called electrohydrodynamic atomization. A 10 wt.% monodispersed solution containing 6% ZnO:Al nanoparticles (ZnO/Al2O3) in ethanol has been synthesized first and then used in the deposition process as the working solution. Pure and uniform transparent films with an average transmittance of 93% have been deposited with crystal structure exhibiting both zincite and gahnite phases. Surface composition purity has been confirmed using X-ray photoelectron spectroscopy technique and the clear indication of Zn-2p and Al-2p peaks confirms surface integrity. Fourier Transform Infrared analysis further confirms the presence of aluminum in the samples. The electrical properties are studied by recording and analyzing the current-voltage (I-V) measurements and the resistivity has been estimated from the slope of the IV-curve which is approximately 25 m Omega.cm. The layer roughness has been characterized using atomic force microscopy. (C) 2012 Elsevier B.V. All rights reserved.

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