Tantalum oxide film prepared by reactive magnetron sputtering deposition for all-solid-state electrochromic device

Title
Tantalum oxide film prepared by reactive magnetron sputtering deposition for all-solid-state electrochromic device
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 5, Pages 1454-1459
Publisher
Elsevier BV
Online
2011-08-29
DOI
10.1016/j.tsf.2011.08.046

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