Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides

Published 2011 View Full Article

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Title
Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 22, Pages 7779-7784
Publisher
Elsevier BV
Online
2011-06-26
DOI
10.1016/j.tsf.2011.06.021

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