Systematic combination of X-ray reflectometry and spectroscopic ellipsometry: A powerful technique for reliable in-fab metrology

Title
Systematic combination of X-ray reflectometry and spectroscopic ellipsometry: A powerful technique for reliable in-fab metrology
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 9, Pages 2782-2786
Publisher
Elsevier BV
Online
2010-12-22
DOI
10.1016/j.tsf.2010.12.075

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