Characterization of Pt/AlN/Pt-based structures for high temperature, microwave electroacoustic devices applications

Published 2011 View Full Article

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Title
Characterization of Pt/AlN/Pt-based structures for high temperature, microwave electroacoustic devices applications
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 19, Pages 6326-6329
Publisher
Elsevier BV
Online
2011-04-19
DOI
10.1016/j.tsf.2011.04.017

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