Deposition of zinc oxide thin films by an atmospheric pressure plasma jet

Published 2010 View Full Article

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Title
Deposition of zinc oxide thin films by an atmospheric pressure plasma jet
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 10, Pages 3095-3099
Publisher
Elsevier BV
Online
2010-12-25
DOI
10.1016/j.tsf.2010.12.156

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