Effects of UV-ozone treatment on radio-frequency magnetron sputtered ZnO thin films

Published 2011 View Full Article

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Title
Effects of UV-ozone treatment on radio-frequency magnetron sputtered ZnO thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 1, Pages 569-573
Publisher
Elsevier BV
Online
2011-07-11
DOI
10.1016/j.tsf.2011.07.004

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