Structure and chemical bonds in reactively sputtered black Ti–C–N–O thin films

Title
Structure and chemical bonds in reactively sputtered black Ti–C–N–O thin films
Authors
Keywords
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Journal
THIN SOLID FILMS
Volume 520, Issue 1, Pages 144-151
Publisher
Elsevier BV
Online
2011-07-11
DOI
10.1016/j.tsf.2011.06.108

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