Oxidation of the surface of a thin amorphous silicon film

Published 2011 View Full Article

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Title
Oxidation of the surface of a thin amorphous silicon film
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 2, Pages 697-699
Publisher
Elsevier BV
Online
2011-05-08
DOI
10.1016/j.tsf.2011.04.189

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