Effect of catalyst for nickel films for NiSi formation with improved interface roughness

Published 2011 View Full Article

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Title
Effect of catalyst for nickel films for NiSi formation with improved interface roughness
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 20, Pages 6658-6661
Publisher
Elsevier BV
Online
2011-04-25
DOI
10.1016/j.tsf.2011.04.081

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