Influence of hydrogen introduction on structure and properties of ZnO thin films during sputtering and post-annealing

Published 2011 View Full Article

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Title
Influence of hydrogen introduction on structure and properties of ZnO thin films during sputtering and post-annealing
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 11, Pages 3809-3815
Publisher
Elsevier BV
Online
2011-01-23
DOI
10.1016/j.tsf.2011.01.187

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