Effects of bias voltage on the microstructure and mechanical properties of (Ti,Al,Cr)N hard films with N-gradient distributions

Published 2011 View Full Article

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Title
Effects of bias voltage on the microstructure and mechanical properties of (Ti,Al,Cr)N hard films with N-gradient distributions
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 15, Pages 4818-4823
Publisher
Elsevier BV
Online
2011-01-14
DOI
10.1016/j.tsf.2011.01.036

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