Suppression of damage to organic light-emitting layers during deposition of Al-doped ZnO thin films by radio-frequency magnetron sputtering

Published 2010 View Full Article

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Title
Suppression of damage to organic light-emitting layers during deposition of Al-doped ZnO thin films by radio-frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 10, Pages 3352-3357
Publisher
Elsevier BV
Online
2010-12-22
DOI
10.1016/j.tsf.2010.12.097

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