Fluorine doped ZnO thin films by RF magnetron sputtering

Published 2010 View Full Article

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Title
Fluorine doped ZnO thin films by RF magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 21, Pages 7579-7582
Publisher
Elsevier BV
Online
2010-12-23
DOI
10.1016/j.tsf.2010.12.126

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