Thermal imidization optimization of polyimide thin films using Fourier transform infrared spectroscopy and electrical measurements

Title
Thermal imidization optimization of polyimide thin films using Fourier transform infrared spectroscopy and electrical measurements
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 6, Pages 1851-1856
Publisher
Elsevier BV
Online
2010-10-22
DOI
10.1016/j.tsf.2010.10.031

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