Morphology of TiN thin films grown on SiO2 by reactive high power impulse magnetron sputtering

Published 2011 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Morphology of TiN thin films grown on SiO2 by reactive high power impulse magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 5, Pages 1621-1624
Publisher
Elsevier BV
Online
2011-07-26
DOI
10.1016/j.tsf.2011.07.041

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.