XPS and AFM studies of surface chemistry and morphology of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation

Title
XPS and AFM studies of surface chemistry and morphology of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 3, Pages 927-931
Publisher
Elsevier BV
Online
2011-05-03
DOI
10.1016/j.tsf.2011.04.184

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