Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

Published 2011 View Full Article

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Title
Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 16, Pages 5638-5644
Publisher
Elsevier BV
Online
2011-03-14
DOI
10.1016/j.tsf.2011.03.006

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