Mechanical characterization of LiPON films using nanoindentation

Published 2011 View Full Article

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Title
Mechanical characterization of LiPON films using nanoindentation
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 1, Pages 413-418
Publisher
Elsevier BV
Online
2011-08-31
DOI
10.1016/j.tsf.2011.07.068

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