Investigation of the effects of bottom anti-reflective coating on nanoscale patterns by laser interference lithography

Published 2011 View Full Article

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Title
Investigation of the effects of bottom anti-reflective coating on nanoscale patterns by laser interference lithography
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 13, Pages 4220-4224
Publisher
Elsevier BV
Online
2011-02-26
DOI
10.1016/j.tsf.2011.02.054

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