Extracting thin film hardness of extremely compliant films on stiff substrates

Published 2010 View Full Article

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Title
Extracting thin film hardness of extremely compliant films on stiff substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 10, Pages 3221-3224
Publisher
Elsevier BV
Online
2010-12-29
DOI
10.1016/j.tsf.2010.12.167

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