Journal
THIN SOLID FILMS
Volume 518, Issue 14, Pages 3801-3807Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.01.009
Keywords
Aluminum-induced crystallization of amorphous silicon; Adhesion; Friction; Hydrophobic; Superhydrophobic; Micro/nano-textured surfaces; Octadecyltrichlorosilane; Self-assembled monolayer
Categories
Funding
- National Science Foundation [CMMI-0645040, DMR-0520550]
- Arkansas Biosciences Institute
- Oak Ridge Associated Universities
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Hydrophobic micro/nano-engineered surfaces (MNESs) with good adhesion and frictional performances were fabricated by the combination of aluminum-induced crystallization (AIC) of amorphous silicon (a-Si) and octadecyltrichlorosilane COTS) coating. The AIC of a-Si technique was used to produce silicon micro/nano-textured surfaces, while an OTS self-assembled monolayer was used to lower the surface energies of the textured surfaces. The wetting properties of the MNESs were studied using a video-based contact angle measurement system. The adhesion and friction properties of the MNESs were investigated using a TriboIndenter. This study shows that the adhesion and frictional performances of all MNESs are significantly improved compared to untreated silicon substrate surfaces, and the adhesion and frictional performances of the OTS-modified textured surfaces strongly correlate to their surface wetting property, i.e., the larger the water contact angle, the better the adhesion and frictional performances of the OTS-modified textured surfaces. (C) 2010 Elsevier B.V. All rights reserved.
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