Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure

Published 2009 View Full Article

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Title
Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 13, Pages 3513-3516
Publisher
Elsevier BV
Online
2009-11-20
DOI
10.1016/j.tsf.2009.11.034

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