Atomic layer deposition of ZnS via in situ production of H2S

Published 2010 View Full Article

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Title
Atomic layer deposition of ZnS via in situ production of H2S
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 19, Pages 5400-5408
Publisher
Elsevier BV
Online
2010-04-01
DOI
10.1016/j.tsf.2010.03.074

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