Study on chemical vapor deposited copper films on cyano and carboxylic self-assembled monolayer diffusion barriers

Published 2010 View Full Article

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Title
Study on chemical vapor deposited copper films on cyano and carboxylic self-assembled monolayer diffusion barriers
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 17, Pages 4852-4859
Publisher
Elsevier BV
Online
2010-02-12
DOI
10.1016/j.tsf.2010.02.016

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