Thermal stability and mechanical properties of arc evaporated ZrN/ZrAlN multilayers

Published 2010 View Full Article

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Title
Thermal stability and mechanical properties of arc evaporated ZrN/ZrAlN multilayers
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 2, Pages 694-699
Publisher
Elsevier BV
Online
2010-08-31
DOI
10.1016/j.tsf.2010.08.119

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