Formation of microcrystalline SiC films by chemical transport with a high-pressure glow plasma of pure hydrogen

Published 2010 View Full Article

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Title
Formation of microcrystalline SiC films by chemical transport with a high-pressure glow plasma of pure hydrogen
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 1, Pages 11-17
Publisher
Elsevier BV
Online
2010-07-09
DOI
10.1016/j.tsf.2010.06.066

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