UV-enhanced atomic layer deposition of ZrO2 thin films at room temperature

Title
UV-enhanced atomic layer deposition of ZrO2 thin films at room temperature
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 22, Pages 6432-6436
Publisher
Elsevier BV
Online
2010-03-31
DOI
10.1016/j.tsf.2010.03.059

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