Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates

Title
Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 14, Pages 3992-3998
Publisher
Elsevier BV
Online
2009-12-07
DOI
10.1016/j.tsf.2009.12.010

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