Sputter deposition from a Ti2AlC target: Process characterization and conditions for growth of Ti2AlC

Published 2009 View Full Article

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Title
Sputter deposition from a Ti2AlC target: Process characterization and conditions for growth of Ti2AlC
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 6, Pages 1621-1626
Publisher
Elsevier BV
Online
2009-11-28
DOI
10.1016/j.tsf.2009.11.059

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