Structural and electrical properties of HfO2/Dy2O3 gate stacks on Ge substrates

Published 2009 View Full Article

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Title
Structural and electrical properties of HfO2/Dy2O3 gate stacks on Ge substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 14, Pages 3964-3971
Publisher
Elsevier BV
Online
2009-11-07
DOI
10.1016/j.tsf.2009.10.160

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